Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.. pp.137-142, 1985. Pittsburgh, Pa.. Materials Research Society
Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A.. pp.111-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Wittorf, D. ; Jager, W. ; Rucki, A. ; Urban, K. ; Hettwer, H.-G. ; Stolwijk, N. A. ; Mehrer, H.
出版情報:
Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A.. pp.183-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Lerch, W. ; Gluck, M. ; Stolwijk, N. A. ; Walk, H. ; Schafer, M. ; Marcus, S. D. ; Downey, D. F. ; Chow, J. W. ; Marquardt, H.
出版情報:
Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.237-, 1998. Pittsburgh, PA. MRS - Materials Research Society
Giese, A. ; Bracht, H. ; Walton, J. T. ; Stolwijk, N. A.
出版情報:
Diffusion mechanisms in crystalline materials : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.395-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Giese, A. ; Bracht, H. ; Walton, J. T. ; Stolwijk, N. A.
出版情報:
Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.219-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Bosker, G. ; Stolwijk, N. A. ; Mehrer, H. ; Sodervall, U. ; Thordson, J. V. ; Anderson, T. G. ; Burchard, A.
出版情報:
Diffusion mechanisms in crystalline materials : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.347-, 1998. Warrendale, Pa.. MRS - Materials Research Society