Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA. pp.49-57, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Micro- and nanotechnology for biomedical and environmental applications : 26-27 January 2000, San Jose, California, USA. pp.41-49, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering