1.

国際会議録
国際会議録
1. Growth of Silicon Suboxide Layer Above An Atomically Abrupt SiO2/Si(100) Interface in Conventional Furnace Oxynitridation Using N2O Ambients
Pennycook, Stephen J. ; Browning, Nigel D. ; Dang, SANJIT S. ; Duscher, GERD ; Rupangudi, Ramana V. ; Takoudis, Christos G. ; Trenary, Michael
出版情報: AIChE 1998 ANNUAL MEETING.  1998.  New York.  American Institute of Chemical Engineers
シリーズ名: AIChE meeting [papers]
シリーズ巻号: 1998
2.

国際会議録
国際会議録
2. Effect of Process Conditions on Gas-Phase Decomposition of Nitrous Oxide in Furnace Oxynitridation of Silicon
Singhvi, Shri ; Dang, Sanjit Singh ; Rupangudi, Ramana V. ; Takoudis, Christos G.
出版情報: AIChE 1998 ANNUAL MEETING.  1998.  New York.  American Institute of Chemical Engineers
シリーズ名: AIChE meeting [papers]
シリーズ巻号: 1998