Chemla, M. ; Bertagna, V. ; Erre, R. ; Rouclle, F. ; Petitdidier, S. ; Levy, D.
出版情報:
Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium. pp.452-464, 2003. Pennington, N.J.. Electrochemical Society
Bertagna, V. ; Menelle, A. ; Petitdidier, S. ; Levy, D. ; Saboungi, M.-L
出版情報:
Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium. pp.525-532, 2003. Pennington, N.J.. Electrochemical Society
Petitdidier, S. ; Gregoire, M. ; Segaud, S. ; Courtas, S. ; Juhel, M. ; Jacquemin, J.P. ; Dumas, L.
出版情報:
Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium. pp.47-52, 2003. Pennington, N.J.. Electrochemical Society
Bellandi, E. ; Alessandri, M. ; Lodi, D. ; Strada, M. ; Pipia, S. ; Petitdidier, S. ; Levy, D.
出版情報:
Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium. pp.337-344, 2001. Pennington, N.J.. Electrochemical Society
Petitdidier, S. ; Guyader, F. ; Barla, K. ; Rouchon, D. ; Rochat, N. ; Erre, R. ; Bertagna, V.
出版情報:
Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium. pp.205-210, 2001. Pennington, N.J.. Electrochemical Society
Bertagna, V. ; Erre, R. ; Petitdidier, S. ; Levy, D. ; Chemla, M.
出版情報:
Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium. pp.211-218, 2001. Pennington, N.J.. Electrochemical Society
Jacques, D. ; Petitdidier, S. ; Regolini, J.L. ; Barla, K.
出版情報:
Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.311-316, 2002. Warrendale. Materials Research Society