1.

国際会議録
国際会議録
1. LASER INDUCED LOCAL DECOMPOSITION OF ADSORBED TUNGSTEN FLUORINE MOLECULES FOR METAL DEPOSITION ON SILICON
Auvert, Geoffroy ; Pauleau, Yves ; Tonneau, Didier
出版情報: In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.155-160,  1990.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 158
2.

国際会議録
国際会議録
2. Characterization and Tribological Properties of Nanostructured Copper/Carbon Composite Films Prepared by Microwave Plasma-Assisted Dual Deposition Processes
Thiery, Francois ; Pauleau, Yves ; Pelletier, Jacques ; Grob, Jean-Jacques
出版情報: Surface engineering 2002 - synthesis, characterization and applications : symposium held December 2-5, 2002, Boston, Massachusetts, U.S.A..  pp.155-160,  2003.  Warrendale, Penn.  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 750
3.

国際会議録
国際会議録
3. Microstructure and Stress Analyses of Copper Films Deposited on Biased Substrates by Microwave Plasma-Assisted Sputtering
Thiery, Francois ; Pauleau, Yves ; Arnal, Yves ; Pelletier, Jacques ; Ortega, Luc
出版情報: Surface engineering 2002 - synthesis, characterization and applications : symposium held December 2-5, 2002, Boston, Massachusetts, U.S.A..  pp.343-348,  2003.  Warrendale, Penn.  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 750