Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia. pp.70-77, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Millar, V. ; Pakes, C.I. ; Climmino, A. ; Brett, D. ; Jamieson, D.N. ; Prawer, S.D. ; Yang, C.J. ; Rout, B. ; McKinnon, R.P. ; Dzurak, A.S. ; Clark R.G.
出版情報:
BioMEMS and smart nanostructures : 17-19 December 2001, Adelaide, Australia. pp.173-178, 2001. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Jamieson, D.N. ; Splatt, F. ; Pakes, C.I. ; Yang, C. ; Spizzirri, P.G. ; Prawer, S.D. ; Stanley, F.E. ; Chan, V. ; Dzurak, A.S. ; Clark, R.G.
出版情報:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems. pp.9-16, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering