Morishita, T. ; Moriyasu, Y. ; Matsui, M. ; Yasujima, A.
出版情報:
Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology. pp.117-126, 2001. Pennington, N.J.. Electrochemical Society
Moriyasu, Y. ; Morishita, T. ; Matsui, M. ; Yasujima, A.
出版情報:
Silicon-on-Insulator Technology and Devices X : proceedings of the tenth International Symposium. pp.19-26, 2001. Pennington, N.J.. Electrochemical Society
Endo, K. ; Teherani, F. Hosseini ; Yoshida, S. ; Kajimura, K. ; Moriyasu, Y.
出版情報:
Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.543-, 1994. Pittsburgh, PA. MRS - Materials Research Society
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