1.

国際会議録
国際会議録
1. Microfabricated ice-detection sensor
DeAnna,R.G. ; Mehregany,M. ; Roy,S.
出版情報: Smart structures and materials 1997 : Smart electronics and MEMS : 4-6 March 1997, San Diego, California.  pp.42-51,  1997.  Bellingham.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3046
2.

国際会議録
国際会議録
2. High-temperature testing of nickel wire bonds for SiC devices
Burla,R.K. ; Roy,S. ; Haria,V.M. ; Zorman,C.A. ; Mehregany,M.
出版情報: Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia.  pp.324-333,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3893
3.

国際会議録
国際会議録
3. Growth and Characterization of SiC Films on Large-Area Si Wafers by APCVD-Temperature Dependence
Wu,C.-H. ; Fleischman,A.J. ; Zorman,C.A. ; Mehregany,M.
出版情報: Silicon carbide, III-nitrides and related materials, ICSCIII-N'97 : proceedings of the International Conference on Silicon Carbide, III-Nitrides and Related Materials, Stockholm, Sweden, September 1997.  Part1  pp.179-182,  1998.  Zuerich, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 264-268
4.

国際会議録
国際会議録
4. Spatial Uniformity of the Mechanical Properties of 3C-SiC Films Grown on 4-Inch Si Wafers as a Function of Film Growth Conditions
Chandra,K. ; Zorman,C.A. ; Mehregany,M.
出版情報: Silicon carbide, III-nitrides and related materials, ICSCIII-N'97 : proceedings of the International Conference on Silicon Carbide, III-Nitrides and Related Materials, Stockholm, Sweden, September 1997.  Part1  pp.635-638,  1998.  Zuerich, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 264-268
5.

国際会議録
国際会議録
5. Fabrication of 3C-SiC on SiO2 Structures Using Wafer Bonding Techniques
Zorman,C.A. ; Vinod,K.N. ; Yasseen,A. ; Mehregany,M.
出版情報: Silicon carbide, III-nitrides and related materials, ICSCIII-N'97 : proceedings of the International Conference on Silicon Carbide, III-Nitrides and Related Materials, Stockholm, Sweden, September 1997.  Part1  pp.223-226,  1998.  Zuerich, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 264-268
6.

国際会議録
国際会議録
6. Surface Micromachining of Polycrystalline SiC Deposited on SiO2 by APCVD
Fleischman,A.J. ; Wei,X. ; Zorman,C.A. ; Mehregany,M.
出版情報: Silicon carbide, III-nitrides and related materials, ICSCIII-N'97 : proceedings of the International Conference on Silicon Carbide, III-Nitrides and Related Materials, Stockholm, Sweden, September 1997.  Part2  pp.885-888,  1998.  Zuerich, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 264-268
7.

国際会議録
国際会議録
7. Behavior of Polycrystalline SiC and Si Surface-Micronrachined Lateral Resonant Structures at Elevated Temperatures
Fleischman,A.J. ; Roy,S. ; Zorman,C.A. ; Mehregany,M.
出版情報: Silicon carbide, III-nitrides and related materials, ICSCIII-N'97 : proceedings of the International Conference on Silicon Carbide, III-Nitrides and Related Materials, Stockholm, Sweden, September 1997.  Part2  pp.889-894,  1998.  Zuerich, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 264-268
8.

国際会議録
国際会議録
8. Fabrication issues in micromachined tunable optical filters
Klemic,J.F. ; Sirota,J.M. ; Mehregany,M.
出版情報: Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas.  pp.89-100,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 2639
9.

国際会議録
国際会議録
9. Integrated process for smart microstructures
Pan,T. ; Melzak,J.M. ; Garverick,S. ; Mehregany,M.
出版情報: Smart structures and materials 1996 : Smart electronics and MEMS : 28-29 January, 1996, San Diego, California.  pp.82-94,  1996.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 2722
10.

国際会議録
国際会議録
10. All-silicon waveguides and bulk-etched alignment structures on(110)silicon for integrated micro-opto-mechanical systems
Smith,S.W. ; Mehregany,M. ; Merat,F.L. ; Smith,D.A.
出版情報: Integrated Optics and Microstructures III.  pp.17-28,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 2686