Hedgccock, I.M. ; Field, D. ; Klemperer, D.F. ; May, P.W.
出版情報:
Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.491-508, 1993. Pennington, NJ. Electrochemical Society
Dickenson, A.C. ; Field, D. ; Klemperer, D.F. ; May, P.W. ; Johnson, P.C. ; Pitts, R.A.
出版情報:
Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.457-470, 1993. Pennington, NJ. Electrochemical Society