OkigaWa, M. ; Matsui, M. ; Tatsumi, T. ; Sekine, M.
出版情報:
Plasma etching processes for sub-quarter micron devices : proceedings of the international symposium. pp.99-104, 1999. Pennington, NJ. Electrochemical Society
Hefyene, N. ; Cristoloveanu, S. ; Ghibaudo, G. ; Matsui, M. ; Yasujima, A.
出版情報:
Silicon-on-Insulator Technology and Devices X : proceedings of the tenth International Symposium. pp.133-138, 2001. Pennington, N.J.. Electrochemical Society
Morishita, T. ; Moriyasu, Y. ; Matsui, M. ; Yasujima, A.
出版情報:
Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology. pp.117-126, 2001. Pennington, N.J.. Electrochemical Society
Nakabayashi, H. ; Doi, M. ; Matsui, M. ; Doyama, M.
出版情報:
Nanophase and nanocomposite materials : symposium held December 1-3, 1992, Boston, Massachusetts, U.S.A.. pp.227-232, 1993. Pittsburg, Pa.. Materials Research Society
Microwave processing of materials : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.. pp.267-272, 1988. Pittsburgh, Pa.. Materials Research Society
Moriyasu, Y. ; Morishita, T. ; Matsui, M. ; Yasujima, A.
出版情報:
Silicon-on-Insulator Technology and Devices X : proceedings of the tenth International Symposium. pp.19-26, 2001. Pennington, N.J.. Electrochemical Society
Uchida, F. ; Matsui, M. ; Kakibayashi, H. ; Kouguchi, M. ; Mutoh, A. ; Nagano, H.
出版情報:
Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.293-, 1994. Pittsburgh. MRS - Materials Research Society
Science and technology of magnetic oxides : symposium held December 1-4, 1997, Boston, Massachusetts, U.S.A.. pp.131-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Doyama, M. ; Matsuoka, H. ; Hirokawa, T. ; Uchida, T. ; Matsui, M.
出版情報:
Clusters and cluster-assembled materials : symposium held November 26-30, 1990, Boston, Massachusetts, U.S.A.. pp.195-200, 1991. Pittsburgh, Pa.. Materials Research Society
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