1.

国際会議録
国際会議録
1. Analytic Model for Self and Mutual Frequency- Dependent Impedances of Multiconductor Interconnects on Lossy Silicon Substrates
Ymeri, Hasan ; Nauwelaers, Bart ; Maex, Karen ; Roest, David De ; Stucchi, Michele
出版情報: Proceedings : International Symposium on Advanced Packaging Materials : processes, properties and interfaces, Chateau Elan, Braselton, Georgia, March 11-14, 2001.  pp.628-633,  2001.  Washington, DC.  IMAPS
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4587
2.

国際会議録
国際会議録
2. GROWTH OF MONOCRYSTALLINE CoSi2 ON CoSi2 SEEDS IN (100)Si
Maex, Karen
出版情報: Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A..  pp.111-116,  1990.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 181
3.

国際会議録
国際会議録
3. TEMPERATURE CONTROL AND UNIFORMITY DURING RAPID THERMAL SILICIDATION
Eichhammer, Wolfgang ; Vandernabeele, Peter ; Maex, Karen
出版情報: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.487-492,  1991.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 224
4.

国際会議録
国際会議録
4. Comparison of the Electromigration Behavior of Al(MgCu) With Al(Cu) and Al(SiCu)
Li, Hua ; Witvrouw, Ann ; Jin, Sing ; Bender, Hugo ; Maex, Karen ; Froyen, Ludo
出版情報: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.133-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 514
5.

国際会議録
国際会議録
5. In-Line Ambient Impurity Measurement on a Rapid Thermal Process Chamber by Atmospheric Pressure Ionization Mass Spectrometry
Kondoh, Eiichi ; Vereecke, Guy ; Heyns, Marc M. ; Maex, Karen ; Gutt, Thomas ; Nenyei, Zsolt
出版情報: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.51-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 525
6.

国際会議録
国際会議録
6. Segregation of Cu on Etched and Non-Etched Al(Cu) Surface
Li, Hua ; Maex, Karen ; Brijs, Bert ; Conard, Thierry ; Vandervorst, Wilfried ; Baklanov, Michael ; Boullart, Werner ; Froyen, Ludo
出版情報: Materials reliability in microelectronics VIII : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.77-,  1998.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 516
7.

国際会議録
国際会議録
7. The Control and Impact of Processing Ambient During RTP
Maex, Karen ; Kondoh, Eiichi ; Lauwers, Anne ; DePotter, Muriel ; Prost, Joris
出版情報: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.239-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 514
8.

国際会議録
国際会議録
8. New Approaches for Formation of Ultra-Thin PtSi Layers for Infrared Applications
Donaton, Ricardo A. ; Jin, Sing ; Bender, Hugo ; Zagrebnov, Maxim ; Baert, Kris ; Maex, Karen ; Vantomme, Andre ; Langouche, Guido
出版情報: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.241-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 514
9.

国際会議録
国際会議録
9. A New Ultra-Low-K Ild Material Based On Organic-Inorganic Hybrid Resins
Zhong, Ben ; Meynen, Herman ; Iocopi, Francesca ; Weidner, Ken ; Mailhouitre, Stephane ; Moyer, Eric ; Bargeron, Cory ; Schalk, Paul ; Peck, Alan ; Hove, Marleen Van ; Maex, Karen
出版情報: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.575-580,  2002.  Warrendale.  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 716
10.

国際会議録
国際会議録
10. Ni-Silicided Deep Source/Drain Junctions Formed by Solid Phase Epitaxial Regrowth
Lauwers, Anne ; Lindsay, Richard ; Henson, Kirklen ; Severi, Simone ; Akheyar, Amal ; Pawlak, Bartek J. ; Potter, Muriel de ; Maex, Karen
出版情報: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.43-48,  2004.  Warrendale, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 810