van der Jeugd, C.A. ; Verbruggen, A.H. ; Leusink, G.J. ; Janssen, G.C.A.M. ; Radelaar, S.
出版情報:
Chemical vapor deposition of refractory metals and ceramics : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.179-184, 1990. Pittsburgh, Pa.. Materials Research Society
Evolution of thin-film and surface microstructure : symposium held November 26-December 1, 1990, Boston, Massachusetts, U.S.A.. pp.211-216, 1991. Pittsburgh, Pa.. Materials Research Society