1.

国際会議録
国際会議録
1. Analysis of in-situ vibration monitoring for end-point detection of CMP planarization processes
Hetherington,D.L. ; Stein,D.J. ; Lauffer,J.P. ; Wyckoff,E.E. ; Shingledecker,D.M.
出版情報: In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May 1999, Edinburgh, Scotland.  pp.89-101,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3743
2.

国際会議録
国際会議録
2. Adaptive Control of a Magnetically Levitated Spindle
Barney,P. ; Lauffer,J.P. ; Redmond,J. ; Sullivan,W.
出版情報: Proceedings of the IMAC-XVIII: a conference on structural dynamics, February 7-10, 2000, the Westin La Cantera Resort, San Antonio, Texas.  Part2  pp.1288-1295,  2000.  Bethel, CT.  Society for Experimental Mechanics
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4062
3.

国際会議録
国際会議録
3. Active chatter control in a milling machine
Dohner,J.L. ; Hinnerichs,T.D. ; Lauffer,J.P. ; Kwan,C.M. ; Regelbrugge,M.E. ; Shankar,N.
出版情報: Smart structures and materials 1997 : industrial and commercial applications of smart structures technologies : 4-6 March 1997, San Diego, California.  pp.281-294,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3044
4.

国際会議録
国際会議録
4. Smart spindle unit for active chatter suppression of a milling machine: II. Dynamics and control
Lauffer,J.P. ; Regelbrugge,M.E. ; Kwan,C.M. ; Lin,Y. ; Xu,R. ; Dohner,J.L ; Hinnerichs,T.D.
出版情報: Smart structures and materials 1998 : industrial and commercial applications of smart structures technologies : 3-5 March 1998, San Diego, California.  pp.167-173,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3326
5.

国際会議録
国際会議録
5. Milling machine for the 21st century:goals,approach,characterization,and modeling
Lauffer,J.P. ; Hinnerichs,T.D. ; Kuo,C.P. ; Wada,B.K. ; Ewaldz,D. ; Winfough,B. ; Shankar,N.
出版情報: Smart structures and materials 1996 : Industrial and commercial applications of smart structures technologies : 27-29 February 1996, San Diego, California.  pp.326-340,  1996.  Bellingham.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 2721