1.

国際会議録
国際会議録
1. Three-dimensional structures for micro-optical mechanical systems in standard CMOS
Kruglick,E.J.J. ; Damle,S. ; Pister,K.S.J.
出版情報: Micromachined Devices and Components.  pp.33-39,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 2642
2.

国際会議録
国際会議録
2. Gas-phase silicon micromachining with xenon difluoride
Chang,F.I. ; Yeh,R. ; Lin,G. ; Chu,P.B. ; Hoffman,E.J. ; Kruglick,E.J.J. ; Pister,K.S.J. ; Hecht,M.H.
出版情報: Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications.  pp.117-128,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 2641