Boerner, M. ; Landau, S. ; Metz, S. ; Kolbesen, B.O.
出版情報:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.338-350, 1997. Pennington, NJ. Electrochemical Society
Metz, S. ; Kilian, G. ; Mainka, G. ; Angelkort, C. ; Rittmeyer, C. ; Stelter, H. ; Fester, A. ; Kolbesen, B.O.
出版情報:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.458-467, 1997. Pennington, NJ. Electrochemical Society
Landau, S. ; Kolbesen, B.O. ; Tillman, R. ; Bruchhaus, R. ; Olbrich, A. ; Fritsch, B. ; Dehm, C. ; Schindler, G. ; Hartner, W. ; Mazure, C.
出版情報:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.789-797, 1998. Pennington, NJ. Electrochemical Society
Fester, A. ; Metz, S. ; Mainka, G. ; Angelkort, C. ; Martin, A.R. ; Herrmann, H. ; Kolbesen, B.O.
出版情報:
ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands. pp.228-235, 1995. Pennington, NJ. Electrochemical Society
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.285-292, 2003. Pennington, NJ. Electrochemical Society
Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.386-392, 2003. Pennington, NJ. Electrochemical Society
Alov, N. ; Oskolok, K. ; Wittershagen, A. ; Kolbesen, B.O.
出版情報:
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.129-135, 2003. Pennington, NJ. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.170-176, 2003. Pennington, NJ. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
国際会議録
