EMLC 2005 : 21st European Mask and Lithography Conference : 31 January-3 February, 2005, Dresden, Germany. pp.63-68, 2005. Bellingham, Wash.,. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Kasprowicz, B. S. ; Conley, W. ; Ham, Y.-M. ; Cangemi, M. J. ; Morgana, N. ; Cottle, R. ; Progler, C. J. ; Wu, W. ; Litt, L. C. ; Cobb, J. ; Roman, B.
出版情報:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA. pp.1469-1477, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Litt, L. C. ; Conley, W. ; Wu, W. ; Peters, R. ; Parker, C. ; Cobb, J. ; Kasprowicz, B. S. ; van den Broeke, D. ; Park, J. C. ; Karur-Shanmugam, R.
出版情報:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA. pp.1459-1468, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
van Adrichem, P. J. M. ; Chacko, M. ; Kasprowicz, B. S.
出版情報:
Photomask and Next-Generation Lithography Mask Technology XII. pp.109-113, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Conley, W. ; Morgana, N. ; Kasprowicz, B. S. ; Cangemi, M. ; Lassiter, M. ; Litt, L. C. ; Cangemi, M. ; Cottle, R. ; Wu, W. ; Cobb, J. ; Ham, Y. -M. ; Lucas, K. ; Roman, B. ; Progler, C.
出版情報:
Optical Microlithography XIX. pp.615411-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Kasprowicz, B. S. ; van Adrichem, P. J. M. ; Chacko, M.
出版情報:
Photomask and Next-Generation Lithography Mask Technology XII. pp.583-588, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering