1.

国際会議録
国際会議録
1. In Situ Monitoring of Thin Film Reactions During Rapid Thermal Annealing: Nickel Silicide Formation
Lavoje, C. ; Purtell, R. ; Cola, C. ; Detavernier, C. ; Desjardins, P. ; Jordan-Sweet, J. ; Cabral, C., Jr. ; d'Heurle, F.M. ; Harper., J.M.E.
出版情報: Rapid thermal and other short-time processing technologies III : proceedings of the international symposium.  pp.455-468,  2002.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 2002-11
2.

国際会議録
国際会議録
2. In Situ Analysis of the Formation of Thin TiSi2 (<50 nm) Contacts in Submicron CMOS Structures During Rapid Thermal Annealing
Clevenger, L. A. ; Cabral, C., Jr ; Roy, R. A. ; Lavoie, C. ; Viswanathan, R. ; Saenger, K. L. ; Jordan-Sweet, J. ; Morales, G. ; Ludwig, K. L., Jr ; Stephenson, G. B.
出版情報: Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA.  pp.257-,  1996.  Pittsburgh.  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 402
3.

国際会議録
国際会議録
3. Light Scattering Measurement of Surface Topography During Formation of Titanium Silicide
Lavoie, C. ; Cabral, C., Jr. ; Clevenger, L. A. ; Harper, J. M. E. ; Jordan-Sweet, J. ; Saenger, K. L. ; Doany, F.
出版情報: Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A..  pp.163-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 406
4.

国際会議録
国際会議録
4. Dependence of Crystallographic Texture of C54 TiSi2 on Thickness and Linewidth in Submicron CMOS Structures
Svilan, V. ; Rodbell, K. P. ; Clevenger, L. A. ; Cabral, C., Jr. ; Roy, R. A. ; Lavoie, C. ; Jordan-Sweet, J. ; Harper, J. M. E.
出版情報: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.53-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 427