Recovery of Silicon and Silicon Carbide Powder from Waste Silicon Wafer Sludge
- 著者名:
- 掲載資料名:
- Eco-materials processing and design XIV : selected, peer reviewed papers from the 14th International Symposium on Eco-materials Processing & Design (ISEPD), January 15-18, 2013, Kagoshima, Japan
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 761
- 発行年:
- 2013
- 開始ページ:
- 65
- 終了ページ:
- 68
- 総ページ数:
- 4
- 出版情報:
- Aedermannsdorf, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
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