Hung, C. -Y. ; Gao, G. ; Zhang, S. ; Deng, Z. -X. ; Cork, C. ; Melvin III, L. S. ; Jiang, Y.
出版情報:
Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA. pp.413-418, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Hung, C. -Y. ; Weckwerth, M. V. ; Visokay, M. R. ; Pao, Y. C. ; Harris, J. S., Jr.
出版情報:
Evolution of epitaxial structure and morphology : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.. pp.537-, 1996. Pittsburgh, Pennsylvania. MRS - Materials Research Society
25th Annual BACUS Symposium on Photomask Technology. pp.599252-599252, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Hung, C. -Y. ; Liu, Q. ; Zhang, L. ; Shang, S. ; Bailey, G. E. ; Jost, A. ; Brist, T.
出版情報:
25th Annual BACUS Symposium on Photomask Technology. pp.599251-599251, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering