Vellianitis, G. ; Apostolopoulos, G. ; Dimoulas, A. ; Argyropoulos, K. ; Mereu, B. ; Scholz, R. ; Alexe, M. ; Hooker, J.C.
出版情報:
Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.. pp.367-372, 2003. Warrendale, Pa.. Materials Research Society
Lander, R.J.P. ; Hooker, J.C. ; Zijl, J.P. van ; Roozeboom, F. ; Maas, M.P.M. ; Tamminga, Y. ; Wolters, R.A.M.
出版情報:
Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.253-260, 2002. Warrendale. Materials Research Society