Ohyama, H. ; Simoen, E. ; Claeys, C. ; Vanhellemont, J. ; Takami, Y. ; Hayama, T. ; Sunaga, H. ; Kobayashi, K.
出版情報:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.143-152, 1997. Pennington, NJ. Electrochemical Society
Watanabe, R. ; Ichiki, K. ; Hayama, T. ; Kawasaki, A.
出版情報:
Functionally graded materials 1998 : proceedings of the 5th International Symposium on Functionally Graded Materials, held in New Town Hall, Dresden, Germany, October 26-29, 1998. pp.19-24, 1999. Uetikon-Zuerich, Switzerland. Trans Tech Publications
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