Temkin, H. ; Green, M. L. ; Brasen, D. ; Bean. J. C.
出版情報:
Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A.. pp.65-70, 1989. Pittsburgh, Pa.. Materials Research Society
Green, M. L. ; Brasen, D. ; Temkin, H. ; Kannan, V. C. ; Luftman, H. S.
出版情報:
Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A.. pp.55-64, 1989. Pittsburgh, Pa.. Materials Research Society
Weir, B. E. ; Silverman, P. J. ; Alers, G. B. ; Monroe, D. ; Alam, M. A. ; Sorsch, T. W. ; Green, M. L. ; Timp, G. L. ; Ma, Y. ; Frei, M. ; Liu, C. T. ; Bude, J. D. ; Krisch, K. S.
出版情報:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.301-, 1999. Warrendale, PA. MRS - Materials Research Society
Sapjeta, J. ; Green, M. L. ; Chang, J. P. ; Silverman, P. J. ; Sorsch, T. W. ; Weir, B. E. ; Gladden, W. ; Ma, Y. ; Sung, C. Y. ; Lennard, W. N.
出版情報:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.289-, 1999. Warrendale, PA. MRS - Materials Research Society