Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A.. pp.111-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Giese, A. ; Bracht, H. ; Walton, J. T. ; Stolwijk, N. A.
出版情報:
Diffusion mechanisms in crystalline materials : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.395-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Giese, A. ; Bracht, H. ; Walton, J. T. ; Stolwijk, N. A.
出版情報:
Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.219-, 1998. Warrendale, Pa.. MRS - Materials Research Society