Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia. pp.364-371, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia. pp.210-215, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Smart structures and materials 2000 : smart electronics and MEMS : 6-8 March, 2000, Newport Beach, USA. pp.294-303, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Smart materials, structures, and integrated systems : 11-13 December 1997, Adelaide, Australia. pp.382-388, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Smart electronics and MEMS II : 13-15 December 2000, Melbourne, Australia. pp.115-125, 2000. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California. pp.85-91, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Smart electronics and MEMS II : 13-15 December 2000, Melbourne, Australia. pp.222-229, 2000. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia. pp.52-58, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering