Photomask and Next-Generation Lithography Mask Technology XI. pp.550-559, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Fontaine, B.M.L. ; Hauschild, J. ; Dusa, M.V. ; Acheta, A. ; Apelgren, E.M. ; Boonman, M. ; Krist, J. ; Khathuria, A. ; Levinson, H.J. ; Fumar-Pici, A. ; Pieters, M.
出版情報:
Optical Microlithography XVI. Part One pp.570-581, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Hendrickx, E. ; Vandenberghe, G. ; Ronse, K.G. ; Colina, A. ; van der Hoff, A. ; Dusa, M.V. ; Finders, J.
出版情報:
22nd Annual BACUS Symposium on Photomask Technology. Part Two pp.1155-1162, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Holden, J.M. ; Gubiotti, T. ; McGaham, W.A. ; Dusa, M.V. ; Kiers, T.
出版情報:
Metrology, Inspection, and Process Control for Microlithography XVI. Part Two pp.1110-1121, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Shi, X. ; Hsu, S. ; Chen, J.F. ; Hsu, M. ; Socha, R.J. ; Dusa, M.V.
出版情報:
Metrology, Inspection, and Process Control for Microlithography XVI. Part Two pp.985-996, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Cramer, H. ; Kiers, T. ; Vanoppen, P. ; Meessen, J. ; Blok, F. ; Dusa, M.V.
出版情報:
Metrology, Inspection, and Process Control for Microlithography XVIII. pp.1254-1264, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Yang, W. ; Lowe-Webb, R. ; Rabello, S. ; Hu, J. ; Lin, J.-Y. ; Heaton, J.D. ; Dusa, M.V. ; Boef, A.J. ; Schaar, M. ; Hunter, A.
出版情報:
Metrology, Inspection, and Process Control for Microlithography XVII. 1 pp.200-207, 2003. Bellingham, WA. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering