1.

国際会議録
国際会議録
1. Step and flash imprint lithography:a new approach to high-resolution patterning
Colburn,M. ; Johnson,S. ; Stewart,M. ; Damle,S. ; Bailey,T.C. ; Choi,B. ; Wedlake,M. ; Michaelson,T. ; Sreenivasan,S.V. ; Ekerdt,J.G. ; Willson,C.G.
出版情報: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part1  pp.379-389,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3676
2.

国際会議録
国際会議録
2. Three-dimensional structures for micro-optical mechanical systems in standard CMOS
Kruglick,E.J.J. ; Damle,S. ; Pister,K.S.J.
出版情報: Micromachined Devices and Components.  pp.33-39,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 2642