1.

国際会議録
国際会議録
1. Electrochemical Properties of Foliated Graphite / Titanate Nanosheets Composites as an Anode Material for Li-ion Secondary Batteries
D. Watanabe ; S. Suzuki ; M. Miyayama
出版情報: Rechargeable Lithium and Lithium Ion Batteries.  pp.59-66,  2009.  Pennington, NJ.  Electrochemical Society
シリーズ名: ECS transactions
シリーズ巻号: 16(29)
2.

国際会議録
国際会議録
2. Corrosion Suppression During Wet Processes in FEOL and BEOL for 45nm Node and Beyond
H. Aoki ; D. Watanabe ; S. Hotta ; C. Kimura ; T. Sugino
出版情報: Cleaning and surface conditioning technology in semiconductor device manufacturing 10.  pp.19-30,  2007.  Pennington, N.J..  Electrochemical Society
シリーズ名: ECS transactions
シリーズ巻号: 11(2)
3.

国際会議録
国際会議録
3. High Rate Etching of Ru and TaN using Electrochemical Reaction for Bevel Cleaning
H. Aoki ; D. Watanabe ; N. Ooi ; J. Jeong ; C. Kimura
出版情報: Copper Interconnects, New Contact Metallurgies/Structures, and Low-k Inter-level Dielectrics, at 214th ECS Meeting, October 12-17, 2008, Honolulu, Hawaii, USA.  pp.9-14,  2009.  Pennington, NJ.  Electrochemical Society
シリーズ名: ECS transactions
シリーズ巻号: 16(19)
4.

国際会議録
国際会議録
4. Phenolic molecular glasses as resists for next-generation lithography
X. Andre ; J. K. Lee ; A. D. Silva ; N. Felix ; C. K. Ober ; H. B. Cao ; H. Deng ; H. Kudo ; D. Watanabe ; T. Nishikubo
出版情報: Advances in resist materials and processing technology XXIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 6519
5.

国際会議録
国際会議録
5. A methyl BN film by using tris-di-methyl-amino-boron (TMAB) for future low-K interlayer
H. Aoki ; S. Tokuyama ; M. K. Mazumder ; D. Watanabe ; C. Kimura
出版情報: Sixth International Conference on Thin Film Physics and Applications : 25-28 September 2007, Shanghai, China.  pp.69841W-1-69841W-6,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 6984