Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.147-150, 1988. Pittsburgh, Pa.. Materials Research Society
Krause, S.J. ; Seraphin, S. ; Chen, B.L. ; Cordts, B. ; Roitman, P.
出版情報:
Surface chemistry and beam-solid interactions : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A.. pp.229-234, 1991. Pittsburgh, Pa.. Materials Research Society
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