Alers, G. B. ; Stirling, L. A. ; Vandover, R. B. ; Chang, J. P. ; Werder, D. J. ; Urdahl, R. ; Rajopalan, R.
出版情報:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.391-, 1999. Warrendale, PA. MRS - Materials Research Society
Sapjeta, J. ; Green, M. L. ; Chang, J. P. ; Silverman, P. J. ; Sorsch, T. W. ; Weir, B. E. ; Gladden, W. ; Ma, Y. ; Sung, C. Y. ; Lennard, W. N.
出版情報:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.289-, 1999. Warrendale, PA. MRS - Materials Research Society
Chang, J. P. ; Steigerwald, M. L. ; Fleming, R. M. ; Opila, R. L. ; Alers, G. B.
出版情報:
Multicomponent oxide films for electronics : symposium held April 6-8, 1999, San Francisco, California, U.S.A.. pp.329-, 1999. Warrendale, PA. MRS-Materials Research Society
Chang, J. P. ; Krautter, H. W. ; Opila, R. L. ; Pal, C. S. ; Zhu, W.
出版情報:
Low-dielectric constant materials V : symposium held April 5-8, 1999, San Francisco, California, U.S.A.. pp.117-122, 1999. Warrendale, Pa.. Materials Research Society
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