Detavernier, Christophe ; Van Meirhaeghe, Roland L. ; Maex, Karen ; Cardon, Felix
出版情報:
Gate stack and silicide issues in silicon processing : symposium held April 25-27, 2000, San Francisco, California, U.S.A.. pp.C7.9-, 2001. Warrendale, PA. Materials Research Society
Detavernier, Christophe ; Van Meirhaeghe, Roland L. ; Cardon, Felix ; Maex, K. ; Brijs, B. ; Vandervorst, W.
出版情報:
Gate stack and silicide issues in silicon processing : symposium held April 25-27, 2000, San Francisco, California, U.S.A.. pp.C10.2-, 2001. Warrendale, PA. Materials Research Society
Detavernier, Christophe ; Van Meirhaeghe, Roland L. ; Maex, Karen ; Cardon, Felix
出版情報:
Gate stack and silicide issues in silicon processing : symposium held April 25-27, 2000, San Francisco, California, U.S.A.. pp.C8.4-, 2001. Warrendale, PA. Materials Research Society