1.

国際会議録
国際会議録
1. Trench isolation technology for high-performance complementary bipolar devices
Brown,K.C. ; Bracken,C. ; Bashir,R. ; Egan,K. ; DeSantis,J. ; Kabir,A.E. ; Yindeepol,W. ; McGregor,J. ; Prasad,S.J. ; Razouk,R. ; Boksha,V.V. ; Rey,J.C.
出版情報: Microelectronic Device and Multilevel Interconnection Technology II.  pp.48-61,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 2875
2.

国際会議録
国際会議録
2. Development and production integration of a planarized AlCu interconnect process for submicron CMOS
Brown,K.C. ; Hill,R. ; Reddy,K. ; Gadepally,K.
出版情報: Microelectronic Device and Multilevel Interconnection Technology.  pp.234-243,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 2636