Karpushin, A. A. ; Sorokin, A. N. ; Baklanov, M. R. ; Maex, K.
出版情報:
Materials reliability in microelectronics VIII : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.195-, 1998. Pittsburgh, Pa.. MRS - Materials Research Society
Baklanov, M. R. ; Vanhaelemeersch, S. ; Alaerts, C. ; Maex, K.
出版情報:
Low-dielectric constant materials IV : symposium held April 14-16, 1998, San Francisco, California, U.S.A.. pp.247-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Baklanov, M. R. ; Dultsev, F. N. ; Mogitnikov, K. P. ; Polovinkin, V. G.
出版情報:
Low-dielectric constant materials V : symposium held April 5-8, 1999, San Francisco, California, U.S.A.. pp.81-86, 1999. Warrendale, Pa.. Materials Research Society
Eslava-Fernandez, Salvador ; Baklanov, M. R. ; Iacopi, F. ; Brongersma, S.H. ; Kirschhock, C.E.A. ; Maex, K.
出版情報:
Materials, technology and reliability of low-k dielectrics and copper interconnects : symposium held April 18-21, 2006, San Francisco, California, U.S.A.. pp.421-426, 2006. Warrendale, Pa.. Materials Research Society
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