1.

国際会議録
国際会議録
1. DEFECT-FORMATION DEPENDENCE ON GROUP V-DOPANT ATOMS IN ELECTRON-IRRADIATED SILICON
Awadelkarim, O.O. ; Henry, A. ; Monemar, B. ; Lindstrom, J.L.
出版情報: Impurities, defects, and diffusion in semiconductors : bulk and layered structures : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.283-286,  1990.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 163
2.

国際会議録
国際会議録
2. Damage Resulting from Polysilicon Gate Etching: Effect of Electrode Age and Sequencing within a Cassette
Mikulan, P.I. ; Awadelkarim, O.O. ; Fonash, S.J. ; Reinhardt, K.A. ; Rembetski, J.F.
出版情報: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.295-301,  1993.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 1993-21
3.

国際会議録
国際会議録
3. OPTICALLY DETECTED MAGNETIC RESONANCE OF A HYDROGEN-RELATED COMPLEX DEFECT IN SILICON
Chen, W.M. ; Awadelkarim, O.O. ; Monemar, B. ; Lindstrom, J.L. ; Oehrlein, G.S.
出版情報: Impurities, defects, and diffusion in semiconductors : bulk and layered structures : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.377-382,  1990.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 163
4.

国際会議録
国際会議録
4. *SURFACE CONDITIONING ISSUES RELATED TO PATTERNING AND ETCHING
Fonash, S.J. ; Ditizio, R.A. ; Gu, T. ; Mikulan, P.I. ; Awadelkarim, O.O. ; Collins, R.W. ; Rembetski, J.F. ; Reinhardt, K.A. ; Chan, Y.D.
出版情報: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.55-68,  1992.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 259
5.

国際会議録
国際会議録
5. Electrical Characterization of Damage Phenomena Induced in Silicon by Magnetically-Enhanced Reactive Ion Etching
Awadelkarim, O.O. ; Gu, T. ; Mikulan, P.I. ; Fonash, S.J. ; Reinhardt, K. ; Chan, Y.D.
出版情報: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.331-342,  1993.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 1993-21
6.

国際会議録
国際会議録
6. An Assessment of Damage Resulting from Resist Stripping
Mikulan, P.I. ; Koo, T.T. ; Awadelkarim, O.O. ; Fonash, S.J. ; Ta, T. ; Chan, Y.D.
出版情報: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.396-402,  1993.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 1993-21
7.

国際会議録
国際会議録
7. Degradation of Minority Carrier Generation Life- time in the Silicon Substrate during Poly-Si Gate RIE Overetch
Gu, T. ; Awadelkarim, O.O. ; Fonash, S.J. ; Rembetski, J.F. ; Chan, Y.D.
出版情報: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.302-310,  1993.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 1993-21