Materials reliability in microelectronics V : symposium held April 17-21, 1995, San Francisco, California, U.S.A.. pp.501-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Alers, G. B. ; Stirling, L. A. ; Vandover, R. B. ; Chang, J. P. ; Werder, D. J. ; Urdahl, R. ; Rajopalan, R.
出版情報:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.391-, 1999. Warrendale, PA. MRS - Materials Research Society
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.559-, 1999. Warrendale, PA. MRS - Materials Research Society
Alers, G. B. ; Monroe, D. ; Krisch, K. S. ; Weir, B. E. ; Chang, A. M.
出版情報:
Materials reliability in microelectronics VI : symposium held April 8-12, 1996, San Francisco, California, U.S.A.. pp.311-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Weir, B. E. ; Silverman, P. J. ; Alers, G. B. ; Monroe, D. ; Alam, M. A. ; Sorsch, T. W. ; Green, M. L. ; Timp, G. L. ; Ma, Y. ; Frei, M. ; Liu, C. T. ; Bude, J. D. ; Krisch, K. S.
出版情報:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.301-, 1999. Warrendale, PA. MRS - Materials Research Society
Chang, J. P. ; Steigerwald, M. L. ; Fleming, R. M. ; Opila, R. L. ; Alers, G. B.
出版情報:
Multicomponent oxide films for electronics : symposium held April 6-8, 1999, San Francisco, California, U.S.A.. pp.329-, 1999. Warrendale, PA. MRS-Materials Research Society
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