1.

国際会議録
国際会議録
1. Indluence of Interfacial Copper on the Ti-SiO2 Reaction during Nitridatin of Cu-Ti Films
Adams, Daniel ; Alford, T. L. ; Theodore, N. D. ; Laursen, T. ; Russell, S. W. ; Kim, M. J.
出版情報: Thermodynamics and kinetics of phase transformations : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.631-,  1996.  Pittsburgh, Penn..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 398
2.

国際会議録
国際会議録
2. The Formation of TiN-Encapsulated Silver Films by Nitridation of Silver-Refractory Metal Alloys in NH3
Adams, Daniel ; Alford, T. L. ; Laursen, T. ; Deng, F. ; Morton, R. ; Lau, S. S.
出版情報: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.337-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 427