Synthesis and characteristics of nanostructured silicon-rich nitride thin films using modified long-wavelength CO2 laser annealing | 東京工業大学附属図書館文献データベース

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Synthesis and characteristics of nanostructured silicon-rich nitride thin films using modified long-wavelength CO₂ laser annealing

著者名:

掲載資料名:

Laser physics letters

発行年:

2015

巻:

12

号:

9

開始ページ:

96003

終了ページ:

96003

総ページ数:

6

出版情報:

Weinheim, Germany: Wiley-VCH

ISSN:

16122011

言語:

英語

資料種別:

学術雑誌

詳細

TDL書誌ID:

ZA00066298

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