Single Crystal Silicon Low-g Acceleration Sensor.

Single Crystal Silicon Low-g Acceleration Sensor.

著者名:

掲載資料名:

2002 SAE world congress : technical paper

シリーズ名:

Society of Automotive Engineers technical paper series

シリーズ巻号:

2002

発行年:

2002

通号:

2002-01-1080

ペーパー番号:

2002-01-1080

総ページ数:

5

出版情報:

Warrendale, Penn.: Society of Automotive Engineers

ISSN:

01487191

言語:

英語

請求記号:

S10400

資料種別:

テクニカルペーパー

詳細

TDL書誌ID:	ZA00001728
シリーズID:	PA00000058
会議名:	SAE 2002 World Congress
回次:	2002
会議開催地:	Detroit, Michigan, USA
会議開催年:	2002.03.04-2002.03.07
論文注記:	SAE 2002 World Congress, Detroit, Michigan, 4-7 March 2002; Reprinted From: Sensors and Actuators 2002, SP-1659

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