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Effect of Crystal Defects on Minority Carrier Diffusion Length in 6H SiC Measured Using the Electron Beam Induced Current Method

著者名:
Tabib-Azar, Massood ( Case Western Reserve Univ. )  
掲載資料名:
NASA Technical Reports
発行年:
1997
巻:
19970037699
号:
NASA/CR-97-205866
パート:
NAS 1.26:205866
開始ページ:
1
終了ページ:
98
総ページ数:
98
出版情報:
National Aeronautics and Space Adminstration
言語:
英語
資料種別:
テクニカルペーパー

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