Role of Boundary Conditions in Monte Carlo Simulation of MEMS Devices
- 著者名:
- Nance, Robert P. ( North Carolina State Univ. )
- Hash, David B. ( National Academy of Sciences - National Research Council )
- Hassan, H. A. ( North Carolina State Univ. )
- 掲載資料名:
- NASA Technical Reports
- 発行年:
- 1997
- 巻:
- 19970025018
- 号:
- NASA-CR-205107
- パート:
- NAS 1.26:205107
- 開始ページ:
- 1
- 終了ページ:
- 14
- 総ページ数:
- 14
- 出版情報:
- National Aeronautics and Space Adminstration
- 言語:
- 英語
- 資料種別:
- テクニカルペーパー
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