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System for the growth of bulk SiC crystals by modified CVD techniques

著者名:
Steckl, Andrew J. ( Cincinnati Univ. )  
掲載資料名:
NASA Technical Reports
発行年:
1994
号:
NASA-CR-200136
通号:
G3/76 0098930
パート:
NAS 1.26:200136
ペーパー番号:
N96-18399
開始ページ:
1
終了ページ:
12
総ページ数:
12
出版情報:
National Aeronautics and Space Adminstration
言語:
英語
資料種別:
テクニカルペーパー

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