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PREPARATION DE COUCHES MINCES D'OXYNITURE DE SILICIUM PAR RECVD EN VUE DE GREFFAGE CHIMIQUE. APPLICATION A UN ISFET PH

著者名:
CLECHET, P.
CROS, Y.
FOMBON, J.J.
JAFFREZIC, N.
MARTIN, J.C.
ROBERT, J.L.
VEDEL, J.
さらに 2 件
掲載資料名:
NASA Technical Reports
発行年:
1991
通号:
N93-11574
ペーパー番号:
N93-11574
開始ページ:
1
終了ページ:
118
総ページ数:
118
出版情報:
National Aeronautics and Space Adminstration
言語:
フランス語
資料種別:
テクニカルペーパー

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