Study of InGaAs Based MODEFET Structures Using Variable Angle Spectroscopic Ellipsometry
- 著者名:
Alterovitz, S.A. ( Lewis Research Center ) Sieg, R.M. ( Cleveland State University ) Yao, H.D. ( University of Nebraska ) Snyder, P.G. Woollam, J.A. Pamulapati, J. ( University of Michigan ) Bhattacharya, P.K. Sekula-Moise, P.A. ( Spire Corporation ) - 掲載資料名:
- NASA Technical Reports
- 発行年:
- 1991
- 号:
- NASA-TM-103792
- パート:
- NAS 1.15:103792
- ペーパー番号:
- N91-19935
- 開始ページ:
- 1
- 終了ページ:
- 13
- 総ページ数:
- 13
- 出版情報:
- National Aeronautics and Space Adminstration
- 言語:
- 英語
- 資料種別:
- テクニカルペーパー
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Optical Dielectric Response of Gallium Nitride Studied by Variable Angle Spectroscopic Ellipsometry
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