DESIGN AND FABRICATION OF MONOLITHICALLY INTEGRATED PRESSURE AND TEMPERATURE SENSOR USING MEMS PROCESSES FOR WIDE BAND GAP MATERIALS

DESIGN AND FABRICATION OF MONOLITHICALLY INTEGRATED PRESSURE AND TEMPERATURE SENSOR USING MEMS PROCESSES FOR WIDE BAND GAP MATERIALS

著者名:

Dasgupta,S. ( GE Corporate Research and Development Center )
Scofield,J.S. ( AFRL/PRPE )
Boyd,J.T. ( Dept. of Elec. & Comp. Eng. & Comp. Sc., University of Cincinnati )

掲載資料名:

AIAA paper

シリーズ名:

AIAA Paper : AIAA Space Conference and Exposition

シリーズ巻号:

2001

発行年:

2001

通号:

2001-4649

ペーパー番号:

AIAA-2001-4649

開始ページ:

1

終了ページ:

10

総ページ数:

10

出版情報:

American Institute of Aeronautics and Astronautics

ISSN:

01463705

言語:

英語

請求記号:

A07400

資料種別:

テクニカルペーパー

詳細

TDL書誌ID:	ZA00050886
シリーズID:	PA00000142
会議名:	AIAA Space 2001 Conference and Exposition
回次:	2001
会議開催地:	Albuquerque, New Mexico
会議開催年:	2001.08.28-2001.08.30

類似資料:

1 テクニカルペーパー Design and Fabrication of a Monolithically Integrated Pressure and Temperature Sensor Using MEMS Processes for Wide Band Gap Materials Dasgupta, S., Scofield, J., Boyd, J. American Institute of Aeronautics and Astronautics	7 テクニカルペーパー A Novel Silicon Base Piezoresistive Pressure Sensor Using Front Side Etching Process. Peng, C-T., Lin, J-C., Lin, C-T., Chiang, K-N., Shie, J-S. American Society of Mechanical Engineers
2 国際会議録 Design and fabrication of optical-MEMS pressure sensor arrays Dasgupta,S., Zhou,J., Wolff,J.M., Jackson,H.E., Boyd,J.T. SPIE-The International Society for Optical Engineering	8 テクニカルペーパー Super Slim Automotive Acceleration Sensor Fabrication Process Developed by Applying Surface MEMS Technology. Sugiura, K., Muto, H., Fukada, T., Fujino, S., Asami, K. Society of Automotive Engineers
3 テクニカルペーパー Viability of Electrically Treating 6061 T6511 Aluminum for Use in Manufacturing Processes. Heigel, J.C., Andrawes, J.S., Roth, J.T., Hoque, M.E. Society of Manufacturing Engineers	9 テクニカルペーパー Attachment of Lead Wires to Thin Film Thermocouples Mounted on High Temperature Materials Using the Parallel Gap Welding Process Holanda, Raymond, Kim, Walter S., Pencil, Eric, Groth, Mary, Danzey, Gerald A. National Aeronautics and Space Adminstration
4 国際会議録 MOEMS pressure sensors for propulsion applications Boyd,J.T., Dasgupta,S., Jackson,H.E. SPIE-The International Society for Optical Engineering	10 テクニカルペーパー New MEMS Process Technology for Pressure Sensors Integrated with CMOS Circuits Shinya Asai, Ryuichirou Abe, Yoshiko Isobe, Noriyuki Iwamori Society of Automotive Engineers
5 テクニカルペーパー Structural Optimization for the Design of Band-Gap Structures Using Discrete Structural Elements K. Mogami, S. Nishiwaki, K. Izui, M. Yoshimura, T. Nomura American Institute of Aeronautics and Astronautics	11 テクニカルペーパー Foresight Vehicle: Smarter Tires Using Advanced Sensors for Improved Safety G.J. Tomka, S. Eaton, J. Milne, W. Hall, R.P. Jones, J.T. Mottram Society of Automotive Engineers
6 テクニカルペーパー Using Nickel Nanocomposite as a Structural Material for MEMS Resonator Fabrication. Teh, K.-S., Lin, L., Cheng, Y.-T. Society of Manufacturing Engineers	12 テクニカルペーパー Detection and Control of Flow Separation Using Pressure Sensors and Micro- Vortex Generators Patel, M.P., Carver, R., Lisy, F.J., Prince, T.S., Ng, T. American Institute of Aeronautics and Astronautics

1

2

3

4

5

6

7

8

9

10

11

12