Role of boundary conditions in Monte Carlo simulation of MEMS devices

Role of boundary conditions in Monte Carlo simulation of MEMS devices

著者名:

Nance, Robert P. ( North Carolina State University )
Hash, David B.
Hassan, H.A.

掲載資料名:

AIAA paper

シリーズ名:

AIAA Paper : Aerospace Sciences Meeting and Exhibit

シリーズ巻号:

1997

発行年:

1997

通号:

97-0375

ペーパー番号:

97-0375

開始ページ:

1

終了ページ:

10

出版情報:

American Institute of Aeronautics and Astronautics

ISSN:

01463705

言語:

英語

請求記号:

A07400

資料種別:

テクニカルペーパー

詳細

TDL書誌ID:	ZA00050850
シリーズID:	PA00000138
会議名:	Aerospace Sciences Meeting and Exhibit
回次:	35th
会議開催地:	Reno, NV
会議開催年:	1997.01.06-1997.01.10
論文注記:	35th Aerospace Sciences Meeting & Exhibit, January 6-10, 1997/Reno, NV

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