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Stiction recovery of microcantilevers by using excimer laser irradiation

著者名:
Fushinobu, K. ( Tokyo Institute of Technology )  
掲載資料名:
AIAA paper
シリーズ名:
AIAA Paper : AIAA/ASME Joint Thermophysics and Heat Transfer Conference
シリーズ巻号:
1998
発行年:
1998
通号:
98-2762
ペーパー番号:
98-2762
開始ページ:
1
終了ページ:
6
出版情報:
American Institute of Aeronautics and Astronautics
ISSN:
01463705
言語:
英語
請求記号:
A07400
資料種別:
テクニカルペーパー

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