Neue Technologien zur metallisierung von halbleiterbauelementen | 東京工業大学附属図書館文献データベース

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Neue Technologien zur metallisierung von halbleiterbauelementen

著者名:

Chadda, Madan M. ( SEMIKRON, Gesellshaft fur Gleichterbau und Elektronik m.b.H. )
Scheffelmann, Franz ( SEMIKRON, Gesellshaft fur Gleichterbau und Elektronik m.b.H. )
Stoeger, Wolfgang ( SEMIKRON, Gesellshaft fur Gleichterbau und Elektronik m.b.H. )

掲載資料名:

NASA Technical Reports

発行年:

1993

号:

BMFT-FB-T 83-035

ペーパー番号:

N83-32935

開始ページ:

1

終了ページ:

59

総ページ数:

59

出版情報:

National Aeronautics and Space Administration

言語:

ドイツ語

資料種別:

テクニカルペーパー

詳細

TDL書誌ID:	ZA00002949
論文注記:	New technologies for metallization of semiconductor devices

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