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A fractal analysis of stiction in microelectromechanical systems

著者名:
掲載資料名:
A.S.M.E. paper
シリーズ名:
ASME Technical Paper : TRIB
シリーズ巻号:
1996
発行年:
1996
通号:
96-TRIB-28
ペーパー番号:
96-TRIB-28
出版情報:
New York: The American Society of Mechanical Engineers
言語:
英語
請求記号:
A11800
資料種別:
テクニカルペーパー

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