Research on Solid Nanocluster NaXe for Making Micro-Excimer Laser
- 著者名:
J.C. Liang Z. Liu T.J. Dong B. Liu D.Y. Chen H.B. Li X.Y. Zhao S.G. Zhang - 掲載資料名:
- Materials for Modern Technologies III
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 896
- 発行年:
- 2017
- 開始ページ:
- 9
- 終了ページ:
- 12
- 総ページ数:
- 4
- 出版情報:
- Aedermannsdorf, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9783035710939 [3035710937]
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
Design and research of zoom optic system applied in micro-processing using 248nm KrF excimer laser
Society of Photo-optical Instrumentation Engineers |
Trans Tech Publications |
Trans Tech Publications |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
Trans Tech Publications |
SPIE - The International Society of Optical Engineering |
Trans Tech Publications |