Production and Characterization of Carbon Thin Films by the Magnetron Sputtering Technique

Production and Characterization of Carbon Thin Films by the Magnetron Sputtering Technique

著者名:

掲載資料名:

The 59th Brazilian Ceramic Conference

シリーズ名:

Materials science forum

シリーズ巻号:

881

発行年:

2017

開始ページ:

471

終了ページ:

474

総ページ数:

4

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9783035711158 [3035711151]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00066553
シリーズID:	PA00000012
会議名:	Brazilian Ceramic Conference (CBC59)
回次:	59th
会議開催地:	Brazil
会議開催年:	2015.05.17-2015.05.20
論文注記:	59th Brazilian Ceramic Conference (CBC59), 17-20 May, 2015

類似資料:

1 国際会議録 Carbon Thin Film Deposition Using High Power Pulsed Magnetron Sputtering B.M. DeKoven, P.R. Ward, R.E. Weiss, D.J. Christie, R.A. Scholl, W.D. Sproul, F. Tomasel, A. Anders Society of Vacuum Coaters	7 国際会議録 On the Effects of the Thermal Treatment on the Structural, Mechanical, and Tribological Properties of Amorphous Carbon Nitrogen Films Deposited by Magnetron … Lacerda, M. M., Freire, F. L., Jr. MRS - Materials Research Society
2 国際会議録 In-Situ GIXRD Characterization of the Crystallization of Ni-Ti Sputtered Thin Films Martins, R.M.S., Silva, R.J.C., Braz Fernandes, F.M., Pereira, L., Gordo, P.R., Maneira, M.J.P., Schell, N. Trans Tech Publications	8 国際会議録 High-power Pulsed dc Magnetron Discharges for Ionized High-rate Sputtering of Thin Films J. Vlcek, A.D. Pajdarova, P. Belsky, M. Kormunda, J. Lestina, J. Musil Society of Vacuum Coaters
3 国際会議録 Characterization of RuO2 Films Prepared by RF Reactive Magnetron Sputtering Meng, L-J., Santos, M. P. dos MRS - Materials Research Society	9 国際会議録 The Interfacial Diffusion Zone in Magnetron Sputtered Ni-Ti Thin Films Deposited on Different Si Substrates Studied by HR-TEM R.M.S. Martins, M. Beckers, A. Mücklich, N. Schell, R.J.C. Silva Trans Tech Publications
4 国際会議録 Mechanical and Tribological Properties of a-GeCx Films Deposited by dc Magnetron Sputtering Jacobsohn, L. G., Reigada, D. C., Freire, F. L., Jr., Prioli, R., Zanette, S. I., Caride, A. O., Nascimento, F. C., … MRS - Materials Research Society	10 国際会議録 Friction and Wear Properties of Magnetron Sputtered DLC/SiC Films on Magnesium Alloy X.J. Xu, D.F. Xia Trans Tech Publications
5 国際会議録 Low Temperature Deposition of Ferromagnetic Ni-Mn-Ga Thin Films From Two Different Targets via RF Magnetron Sputtering A.C. Lourenço, F. Figueiras, S. Das, J.S. Amaral, G.N. Kakazei, D.V. Karpinsky, N. Soares, M. Peres, M.J. Pereira, P.B. … Materials Research Society	11 国際会議録 Si_xC_y Thin Films Deposited at Low Temperature by DC Dual Magnetron Sputtering: Effect of Power Supplied to Si and C Cathode Targets on … H.S. Medeiros, R.S. Pessoa, J.C. Sagás, M.A. Fraga, L.V. Santos Trans Tech Publications
6 国際会議録 The Influence of Additives on Electrical Characteristics of DLC Films Deposited by Reactive Sputtering Mansano, R. D., Mousinho, A. P., Zambom, L. S., de Medeiros, M. S., Verdonck, P., Guerino, M., Massi, M. Electrochemical Society	12 国際会議録 Characterization of AlF3 thin films in the ultraviolet by magnetron sputtering of aluminum target B.-H. Liao, M.-C. Liu, C.-C. Lee SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12