Laser-induced birefringence in fused silica from polarized lasers

Laser-induced birefringence in fused silica from polarized lasers

著者名:

Ulrich Neukirch

掲載資料名:

Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5754

発行年:

2005

パート:

2

開始ページ:

638

終了ページ:

645

総ページ数:

8

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819457349 [0819457345]

言語:

英語

請求記号:

P63600/5754

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014979
シリーズID:	PA00000029
会議名:	SPIE Advanced Lithography : Advances in resist technology and processing
回次:	2005 : 18th
会議開催地:	San Jose, CA, USA
会議開催年:	2005.03.01-2005.03.04
論文注記:	18th Optical microlithography,1-4 March, 2005, San Jose, California, USA

類似資料:

1 国際会議録 Advances in the use of birefringence to measure laser-induced density changes in fused silica Moll, J., Allan, D.C., Neukirch, U. SPIE - The International Society of Optical Engineering	7 国際会議録 ArF-laser-induced absorption in fused silica exposed to low fluence at 2000 Hz Moll,J. SPIE-The International Society for Optical Engineering
2 国際会議録 Exposure and compositional factors that influence polarization induced birefringence in silica glass D. C. Allan, M. Mlejnek, U. Neukirch, C. M. Smith, F. M. Smith SPIE - The International Society of Optical Engineering	8 国際会議録 Compaction of fused silica under low-fluence/long-term 193-nm irradiation Smith,C., Borrelli,N.F., Allen,D.C., Seward,T.P. SPIE-The International Society for Optical Engineering
3 国際会議録 Induced absorption in silica (a preliminary model) Araujo, Roger J., Borrelli, Nicholas F., Smith, Charlene SPIE	9 国際会議録 Photonic Crystal Fivers: Effective-Index and Band-Gap Guidance Allan C. Douglas, West A. James, Fajardo C. James, Gallagher T. Michael, Koch W. Karl, Borrelli F. Nicholas Kluwer
4 国際会議録 Measurement and analysis of compaction in fused silica Allan,D.C., Smith,C., Borrelli,N.F. SPIE - The International Society for Optical Engineering	10 国際会議録 Chemical etch effects on laser-induced surface damage growth in fused silica Hrubesh,L.W., Norton,M.A., Molander,W.A., Wegner,P.J., Staggs,M.C., Demos,S.G., Britten,J.A., Summers,L.J., … SPIE-The International Society for Optical Engineering
5 国際会議録 Induced density changes in 193-nm excimer-laser-damaged silica glass: a kinetic model Allan, D.C., Araujo, R.J., Smith, C.M., Borrelli, N.F. SPIE - The International Society of Optical Engineering	11 国際会議録 Measurement of excimer-laser-induced birefringence in fused silica and calcium fluoride Wang,B. SPIE - The International Society for Optical Engineering
6 国際会議録 Excimer-laser-induced absorption in fused silica Moll,J., Schermerhorn,P.M. SPIE - The International Society for Optical Engineering	12 国際会議録 Deterministic nanosecond laser-induced breakdown thresholds in pure and Yb3+ doped fused silica A. Smith, B. Do, M. Soderlund SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12